Reliability Checks to Consider Before Approving a Mica Heating Plate Design

https://advanced-thermal-systems.readspirex.com/posts/how-heating-and-cooling-functions-can-be-combined-in-a-wafer-heater

In semiconductor support equipment, a mica heating plate must deliver heat in a controlled way. It uses a mica-insulated resistive heater built for plate-style heat transfer. One useful trait is custom plate geometry