Testing Temperature Uniformity Across a Mica Heater Surface
https://industrial-heat-guide.westhavenscope.com/posts/wafer-heater-materials-and-construction-what-engineers-should-know
In heated plates, a mica heater must deliver heat in a controlled way. It uses a resistive heating circuit supported and insulated by mica. One useful trait is high-temperature capability. Still, mechanical stress can change the result